| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device in which the reflection of a surface wave is performed correctly efficiently, a frequency modulation is reduced, an energy loss is reduced, and the stabilized performance is maintained over a long period of time; and to provide a method of manufacturing this surface acoustic wave device. SOLUTION: The surface acoustic wave device 10 includes a substantially rectangular recess 52 provided in a piezoelectric material layer 50, an IDT 60 with a pectinated electrode formed in the bottom 51 of the recess 52, and acoustic reflection walls 71A and 71B which reflect the surface wave formed inside the side wall of the recess 52. The opposed two end faces of acoustic reflection walls 71A and 71B are provided at a right angle to the propagating direction of these acoustic refection walls 71A and 71B. The acoustic impedance of these acoustic reflection wall is different from the acoustic impedance of the piezoelectric material layer 50. COPYRIGHT: (C)2006,JPO&NCIPI
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