| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow measuring instrument capable of enhancing measurement resolution to allow accurate measurement. SOLUTION: When a fluid to measure the flow rate is supplied and discharged to/from a measuring chamber 4, a diaphragm 11 provided in the measuring chamber 4 is reciprocation-moved, and a circulation part R1 is circulated in accompaniment to the reciprocation moving of the diaphragm 11. Since a magnet 5 or an azimuth sensor 6 is provided in the circulation part R1, the magnet 5 or the azimuth sensor 6 is also circulation-moved. A position of the diaphragm 11 is detected by detecting the circulation moving by the azimuth sensor 6 to find a relative position between the both, and the measurement resolution is thereby enhanced to allow the accurate measurement. COPYRIGHT: (C)2006,JPO&NCIPI
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