发明名称 |
EINEN VERBUNDWERKSTOFF VERWENDENDES HALBLEITERBAUTEIL ODER WÄRMEABLEITENDES SUBSTRAT DAFÜR |
摘要 |
A composite material that consists mainly of ceramic and semi-metal, that is high in thermal conductivity, that is light in weight, and that has high compatibility in coefficient of thermal expansion (CTE) with a semiconductor element and another member comprising ceramic; a member comprising this composite material; and a semiconductor device comprising the member. The composite material has a structure in which the interstices of a three-dimensional network structure comprising ceramic are filled with a semi-metal-containing constituent produced by deposition after melting, has a CTE of 6 ppm/ DEG C or less, and has a thermal conductivity of 150 W/m.K or more. The semiconductor device comprises the composite material. The composite material can be obtained by filling the pores of a porous body consisting mainly of ceramic with a semi-metal-containing constituent. <IMAGE> |
申请公布号 |
DE60021514(T2) |
申请公布日期 |
2006.04.13 |
申请号 |
DE2000621514T |
申请日期 |
2000.06.08 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD.;FUKUI, AKIRA |
发明人 |
FUKUI, AKIRA;YAMAGATA, SHINICHI;KAMITAKE, KAZUYA;ABE, YUGAKU |
分类号 |
C04B41/88;C04B35/573;C04B41/50;C04B41/51;C04B41/85;H01L23/14;H01L23/15;H01L23/373 |
主分类号 |
C04B41/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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