Apparatus for regenerating and recycling soiled fluid from cleaning of sawn wafer blocks, especially of silicon, comprising centrifuge for removing solids and fluid supply and recycling systems

摘要

Apparatus for regenerating soiled cleaning fluid from the cleaning of sawn wafer blocks comprises a centrifuge (104) for removing solids from the soiled fluid; a supply system (102, 110, 112) for transferring the soiled fluid from the block cleaning device (100) to the centrifuge; and a recycling system (106, 114, 116) for returning the purified fluid to the block cleaning device.