| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the precision of inspection by setting an inspection area to an inspection target portion with high precision. <P>SOLUTION: A whole image 103 of a substrate to be inspected is created preliminarily, and an inspection area 31 is associated with an inspection target portion on the whole image 103. At the time of inspection, a camera 3A is positioned correspondingly to an imaging target area 30 to capture a processing target image 40. An area 41 corresponding to the processing target image 40 is extracted from the whole image 103, and offset values Δx and Δy of the area 41 relative to the imaging target area 30 are calculated. The set position of the inspection area 31 is corrected by using the offset values Δx and Δy, and the inspection area is set to the processing target image 40, based on the corrected coordinates. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
