| 摘要 |
<P>PROBLEM TO BE SOLVED: To move a stage without degrading a throughput. <P>SOLUTION: This stage apparatus is provided with a moving stage 53 moving along a moving surface Ba, and a first moving table 52 which holds a test piece P and which can be moved to the moving stage 53. The apparatus is provided with a second moving table 70 which is provided on the moving stage, and which is positioned at a first position K1 when the first moving table 52 is moved from the first position K1 to a second position K2. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
