| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrode for ozone generation which is preferable in efficient generation of ozone water usable in cleaning and sterilizing of water and sewage, food or the like, or cleaning in a semiconductor device manufacturing process by an electrolysis process, and a method of manufacturing the electrode for ozone generation. <P>SOLUTION: The surface of a conductive substrate 2 constituting the electrode 1 for ozone generation is coated with a noble metal such as platinum or a noble metal oxide to form an intermediate layer 3, further a surface layer 4 is constituted of a dielectric material on the surface of the intermediate layer 3, and the surface layer is provided with holes 10. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
