| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure bearing having high-rigidity supporting performance independently of the face accuracy of a supporting face. SOLUTION: Even when the supporting face of a guide rail 2 is locally inclined, a bearing portion 3b is inclined accordingly to make a gap between the bearing portion 3b and the supporting face approximately uniform as a whole. Thereby, the unbalanced pressure of air discharged between the bearing portion 3b and the supporting face is corrected to permit the support of a slider 3 on the guide rail 2 with high rigidity. COPYRIGHT: (C)2006,JPO&NCIPI
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