SUBSTRATE PROCESSING EQUIPMENT AND ELECTRIC HEATER FOR SUBSTRATE PROCESSING EQUIPMENT, AND SUBSTRATE PROCESSING EQUIPMENT EQUIPPED WITH THIS

摘要

PROBLEM TO BE SOLVED: To make a heating element long in life by suppressing a generation of heat strain of a heating element, and by preventing the heating element from contacting with each other and with a structure of liner tube or the like simultaneously in a substrate processing equipment and an electric heater for the substrate processing equipment. SOLUTION: The equipment comprises a processing chamber processing by housing a substrate 12, and a heating arrangement 2, having a heating element 43, heating inside of the processing chamber with the heating element. The heating element is held in only one end by a holding portion. And, the heating element is formed so that at least one portion may be profiled in convex toward the substrate. COPYRIGHT: (C)2006,JPO&NCIPI