| 摘要 |
PROBLEM TO BE SOLVED: To suppress wear out of a shield mask or the like in a frequency adjustment device of a piezo-electric element by ion beam irradiation. SOLUTION: The ion gun consists of a plasma generating means having a discharge part inside and a grid for emitting ion beams by extracting ions from the plasma generated by the plasma generation means. A control means for controlling current density distribution in the cross-section of the ion beams is provided. COPYRIGHT: (C)2006,JPO&NCIPI
|
