METHOD AND DEVICE FOR SUPERPOSING FLAT PANELS, AND METHOD AND DEVICE FOR ASSEMBLING PLASMA DISPLAY PANEL USING THE SAME

摘要

PROBLEM TO BE SOLVED: To prevent positional deviation between a front face substrate and a back face substrate. SOLUTION: In a condition where the front face substrate FS sucked and held by a lower substrate table is raised and pushed to the back face substrate RS sucked and held by an upper substrate table 2 while performing vacuum holding by a suction table 20 of a shift preventing mechanism 6 so that the front face substrate FS is not bent, both substrates are aligned. Then, a peripheral end face of the back face substrate RS and a peripheral end face of the front face substrate FS are clamped with a clip 32 for fixing. COPYRIGHT: (C)2006,JPO&NCIPI