| 摘要 |
The invention relates to a device that allows a rapid change of substrate and safeguards that the winding mechanism (17) remains unaffected by deformations of the vacuum chamber (3). For this purpose, a supporting tube (1) is used which extends through the door (2) of the vacuum chamber (3). The weight of the door (2) and the tube (1) is received by a carriage. The vacuum seal between the tube (1) and the door (2) is configured as at least one sealing ring (15). Two bearing brackets (4, 5) are fastened on the supporting tube (1), without being firmly fixed to the chamber (3). The winding rollers (6, 8 and 10 to 12) are received on these bearing brackets in such a manner that the roller axes lie in parallel to the supporting tube (1). |
