| 摘要 |
PROBLEM TO BE SOLVED: To adjust variations of resonance frequency of a mirror and to make the deflection angle of the mirror constant. SOLUTION: A stem 20 for an optical scanner 10 is formed with a recess 22 for the purpose of setting an adjustment substrate 30. When fixed with a torsion bar 3 in the recess 22, the adjustment substrate 30 is preliminarily die-bonded so that a part working as a spring of the torsion bar 3 has a prescribed length. In addition, when the optical scanner 10 is die-bonded to the stem 20, the adjustment substrate 30 is also coated with an adhesive on the upper face. As a result, the torsion bar 3 of the optical scanner 10 has a prescribed length, with the resonance frequency adjusted thereby. COPYRIGHT: (C)2006,JPO&NCIPI
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