| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device which can remove an organic material for an organic EL attached to a mask. SOLUTION: The cleaning device is provided with first and second cleaning tanks 21, 22 cleaning a mask 10 with a predetermined cleaning solution; a vacuum distiller 30 vacuum-distilling the cleaning solution of the first and second cleaning tanks 21, 22; a first cooler 31 cooling the vacuum-distilled cleaning solution to room temperature; a first return pipe 101 returning the cleaning solution cooled by the first cooler 31 to the second cleaning tank 22; first and second rinse tanks 51, 52 rinsing the mask 10 with a predetermined rinse solution; an atmospheric pressure distiller 60 distilling the rinse solution in the first and second rinse tanks 51, 52 at atmospheric pressure; a second cooler 61 cooling the rinse solution distilled at the atmospheric pressure to the room temperature; and a second return pipe 102 returning the rinse solution cooled by the second cooler 61 to the second rinse tank 52. COPYRIGHT: (C)2006,JPO&NCIPI
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