| 摘要 |
A semiconductor structure includes a trench formed in an epitaxial layer that overlies a semiconductor substrate, the sides of the trench being lined with an oxide layer. The trench is filled with a conductive material, e.g., a metal or heavily-doped polysilicon, and the conductive is in contact with the substrate or a doped region in the substrate or epitaxial layer. The structure expands far less horizontally than conventional diffusions and therefore allows a higher packing density of devices formed in the epitaxial layer. The structure may be used in place of conventional sinkers and isolation diffusions.
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