MILLIMETER WAVE PIXEL AND FOCAL PLANE ARRAY IMAGING SENSORS THEREOF

摘要

Shown is a focal plane array millimeter wave image sensor composed of at least a millimeter wave pixel, the millimeter wave pixel being composed of a plurality of sub-pixels. The millimeter wave pixels may be formed on a single substrate or placed on another appropriate substrate to achieve the overall size suitable for the specific image sensing application. Each sub-pixel is composed of a micro-machined thermal sensor.