A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimensionally, or can only sense in a single plane. Vibration cancellation may be provided.
申请公布号
WO2006039561(A2)
申请公布日期
2006.04.13
申请号
WO2005US35315
申请日期
2005.09.30
申请人
UNIVERSITY OF SOUTHERN CALIFORNIA;BEI TECHNOLOGIES, INC.;KIM, EUN, SOK;ZOU, QIANG;MADNI, ASAD;COSTLOW, LYNN;VUONG, JIM;WELLS, ROGER
发明人
KIM, EUN, SOK;ZOU, QIANG;MADNI, ASAD;COSTLOW, LYNN;VUONG, JIM;WELLS, ROGER
