| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem that there likely occurs a trouble that desired sensitivity cannot be obtained if an object to be worked is a sensor or the like in comparison with characteristics of an annular electrode film which is linked in one body, since a cutoff is formed in a part of the annular electrode film and the annular electrode film becomes discontinuous when the annular electrode film is formed by a prior art. <P>SOLUTION: A method of forming an annular electrode film includes a step of disposing a magnet in a tubular inner space of an annular object to be worked; fitting a projection into the opening of the tubular inner space for a first mask including, on its one principal surface, the projection fitted into the opening of the tubular inner space and formed of a magnetic substance with the inner peripheral shape of the annular electrode film as its outer shape; forming a metal film on the surface of the object to be worked exposed in a mask pattern by a film forming method by disposing second masks each of which is formed with a space with the outer peripheral shape of the annular electrode film as its inner shape, on front and rear principal surfaces of the object to be worked; and detaching the first mask, the second masks and the magnet from the object to be worked. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
