发明名称 METHOD FOR MANUFACTURING LAMINATED PIEZOELECTRIC ELEMENT AND OXYGEN SUPPLY METHOD
摘要 <P>PROBLEM TO BE SOLVED: To prevent insulation resistance at a high-temperature region of approximately 150&deg;C from decreasing without reacting the oxidation of an internal electrode when manufacturing a laminated piezoelectric element, where the internal electrode is made of a base metal, such as Cu. <P>SOLUTION: In a method for manufacturing the laminated piezoelectric element, a piezoelectric ceramics layer and the internal electrode are laminated. The method comprises a baking process for baking a laminate in which ceramic composition powder in a prescribed composition, a piezoelectric ceramics layer precursor containing a binder, and an internal electrode precursor containing the base metal as a conductive material under a first reducing atmosphere; and a heat treatment process for heating the baked laminate under a second reducing atmosphere having oxygen partial pressure that is larger than that of the first reducing atmosphere. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006100598(A) 申请公布日期 2006.04.13
申请号 JP20040285386 申请日期 2004.09.29
申请人 TDK CORP 发明人 INOUE MASAYOSHI;TSUKADA GAKUO;NANAO MASARU;SAKAMOTO NORIMASA
分类号 H01L41/083;H01L41/187;H01L41/22;H01L41/257;H01L41/273;H01L41/43 主分类号 H01L41/083
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