| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device provided with an organic TFT having high reliability while manufactured through a simplified production process, in view of the problem that an organic semiconductor layer of an organic TFT tends to deteriorate under influence of water, light, oxygen, or the like. SOLUTION: A semiconductor layer containing an organic material is formed through etching with use of a mask and the organic TFT is completed with the mask left unremoved on the semiconductor layer. Employing the remaining mask allows protecting the semiconductor layer from the deterioration caused by water, light, oxygen, or the like. COPYRIGHT: (C)2006,JPO&NCIPI
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