SOLID-STATE IMAGING APPARATUS AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a solid-state imaging device that prevents image defects such as flares or ghosts by reflection at a microlens surface and is useful to improve sensitivity. SOLUTION: The surface of a microlens 7 formed by heating and melting (reflow) process or by the use of a gray tone mask is processed by plasma and wet etching and is made uneven (roughened). This suppresses the reflection at the surface of the microlens and prevents reflection with a camera lens, and then the occurrence of the image defects such as flares or ghosts can be suppressed and also, is useful to improve the sensitivity. COPYRIGHT: (C)2006,JPO&NCIPI