| 摘要 |
PROBLEM TO BE SOLVED: To simply trap the fine particles worn away from the roll sliding member. SOLUTION: An amorphous or multilayer solid lubricant film is formed on the body to be treated. The film formation is carried out by using the closed magnetic imbalance magnetron sputtering (UBMS) apparatus that has the targets 16a, 16b, 16c and 16d for being sputtered, the imbalance magnetic field-generating means 11, 12 for generating an imbalance magnetic field on the surface of the targets, and an arranging means 14 for arranging the body to be treated so that the substance to be sputtered from the targets may be adhered to the body to be treated. Since at least one of the target (16b) is constituted with a magnetic substance (Ni), the solid lubricant film formed on the treated body is not almost influenced when the film is formed on the body to be treated, but when the film becomes powdery particles by the outer influence, they are influenced with the magnetic field. COPYRIGHT: (C)2006,JPO&NCIPI |
