| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser irradiation method in which a phase of pulse laser beams to be synthesized is not controlled, a composition is made so that a plurality of pulse laser beams propagate on an identical optical axis, and the synthesized pulse laser beams can be formed as a linearly polarized light which aligns a polarizing direction of each pulse. SOLUTION: The laser irradiation method comprises the step (a) of synthesizing a first pulse laser beam which is a linearly polarized light, and a second pulse laser beam which has a plane of polarization perpendicular to a plane of polarization of the first pulse laser beam, and is a linearly polarized light which propagates along the plane of polarization of the first pulse laser beam, so that the first and second pulse laser beams propagate on the identical optical axis without being overlapped on each other on the optical axis; and the step (b) of aligning the polarizing direction of each pulse of the laser beams formed by compositing the first and second pulse laser beams in the step (a) so as to be in parallel to each other. COPYRIGHT: (C)2006,JPO&NCIPI
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