| 摘要 |
PROBLEM TO BE SOLVED: To enable the efficient removal of minute particles without causing damage to a substrate. SOLUTION: Pure water containing a dissolved nitrogen gas is supplied from the lower part of a processing tank 562 and overflowed from the upper end of the processing tank 562. The inside of a casing 560 including the processing tank 562 is decompressed while the overflow state is continued. The nitrogen gas dissolved in the pure water saturates and becomes minute bubbles B1 in the pure water. The bubbles B1 grow between the substrate W and particles PT to separate the particles PT from the substrate W. The particles separated from the substrate W are transferred upward and rapidly removed by the flow of the pure water. COPYRIGHT: (C)2006,JPO&NCIPI
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