| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing method applicable for polishing a workpiece having a shape symmetrical about a rotation axis, by which a correct removal amount can be calculated with respect to a workpiece surface at any curvature, and a good workpiece surface can be produced with high shape accuracy and without waviness. SOLUTION: The polishing method is implemented by calculating a machining amount necessary for correcting the shape of the workpiece, at every radial location of the workpiece, based on shape data of the same, calculating the curvature of the workpiece at every radial location, selecting a corrected profile corresponding to the curvature at every radial curvature, overlapping the corrected profile on a machining amount distribution 18 necessary for correction of the shape, by executing an arithmetic operation of deconvolution method, calculating a scanning speed for correcting the shape, from a result 19 of the arithmetic operation, and creating a machining program for correcting the shape. Thus the workpiece is polished according to the machining program. COPYRIGHT: (C)2006,JPO&NCIPI
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