发明名称 Low dielectric constant substrate
摘要 A mesoporous silica powder. The powder comprises an open pore structure, generates a diffractive peak when irradiated by an X-ray with an incident angle of less than about 10 degrees.
申请公布号 US2006079606(A1) 申请公布日期 2006.04.13
申请号 US20050165127 申请日期 2005.06.24
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 MIN CHUN-KUO;SHIH HSI-HSIN;HSU MAO-FENG;YAO HSIN-HUNG
分类号 C01B33/12;C08K9/06 主分类号 C01B33/12
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