发明名称 |
Low dielectric constant substrate |
摘要 |
A mesoporous silica powder. The powder comprises an open pore structure, generates a diffractive peak when irradiated by an X-ray with an incident angle of less than about 10 degrees.
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申请公布号 |
US2006079606(A1) |
申请公布日期 |
2006.04.13 |
申请号 |
US20050165127 |
申请日期 |
2005.06.24 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
MIN CHUN-KUO;SHIH HSI-HSIN;HSU MAO-FENG;YAO HSIN-HUNG |
分类号 |
C01B33/12;C08K9/06 |
主分类号 |
C01B33/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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