发明名称 |
X-ray generator and exposure apparatus |
摘要 |
An X-ray generator for generating plasma and X-ray emitted from the plasma includes a unit for generating the plasma, and plural reflection optical systems for introducing the X-ray through different optical paths.
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申请公布号 |
US2006078089(A1) |
申请公布日期 |
2006.04.13 |
申请号 |
US20050246485 |
申请日期 |
2005.10.07 |
申请人 |
MASAKI FUMITARO;MIYAKE AKIRA |
发明人 |
MASAKI FUMITARO;MIYAKE AKIRA |
分类号 |
H05G2/00 |
主分类号 |
H05G2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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