| 摘要 |
PROBLEM TO BE SOLVED: To provide a high frequency filter in which a resonance frequency can be fixed with high accuracy at a desired value. SOLUTION: In the structure of a high frequency filter 100; a grounding layer 12, an insulating layer 14, a magnetic layer 20, and a conductive layer 16 are sequentially laminated on a semiconductor substrate 10. A strip line is formed of the insulating layer 14, the magnetic layer 20, and the conductive layer 16. The magnetic layer 20 is a laminated film in which a non-magnetic layer 22 is put between a first ferromagnetic layer 21 and a second ferromagnetic layer 22, and the magnetic layer 20 functions as an artificial ferry magnetic thin film. COPYRIGHT: (C)2006,JPO&NCIPI
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