| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method which attains high cleaning performance and a low cost, in cleaning the cover glass of a solid-state image pickup device. SOLUTION: The cleaning method of the cover glass is employed when the solid-state image pickup device is manufactured, wherein a solid-state image pickup element chip with a solid-state image pickup element formed on its surface, and the cover glass joined to the solid-state image pickup element chip, are provided between the solid-state image pickup element chip and the cover glass. Then the device is sealed by a spacer of a predetermined thickness of a shape surrounding the solid-state image pickup element. The cleaning method includes a first wet cleaning process in which the cover glass with the spacer formed on the surface is cleaned by deionized water, a dry cleaning process in which ashing of the cover glass is carried out by oxygen plasma, and a second wet cleaning process in which the cover glass is cleaned by APM liquid. COPYRIGHT: (C)2006,JPO&NCIPI
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