| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flattening film excellent in heat resistance, low water absorptivity, electric insulating property, transparency, solvent resistance and burying property for a level difference, and to provide a semiconductor device and a display device using the film. <P>SOLUTION: The flattening resin layer is obtained by applying the following resin composition on a substrate having a level difference to form a resin composition layer; irradiating the resin composition layer with active energy rays; bringing a developer solution into contact with the layer to form a pattern; and thermally curing the resin composition at ≤280°C. The resin composition contains (A) a cyclic olefin resin having an acidic group and a chain organic group having four or more atoms bonded, both in side chains, (B) a photosensitive material having a 1,2-naphthoquinone diazide structure, and (C) a compound having a reactive group which can be bonded with the acidic group in (A) at ≥130°C. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
