| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pickup device which prevents a chip taken out by an absorption nozzle from shifting with respect to this absorption nozzle. <P>SOLUTION: The pickup device for the chip takes out a chip 4 by absorbing a surface on which a bump 27. There is provided a absorption nozzle 16 in which a suction hole 25 is formed so as to be opened to an end surface. When the absorption nozzle 16 absorbs the surface of the chip 4 on which the bump 27 is formed, a recess 26 engaging with the bump 27 is formed at least on an inside surface of a tip of the suction hole 25. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
