发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a MOS transistor including a Schottky-S/D structure having small interface resistance Rc. SOLUTION: The MOS transistor having a first-conductivity-type channel comprises a first-conductivity-type semiconductor region 1 containing first and second channel regions CH; a gate insulating film 2 provided on the first and second channel regions CH; a gate electrode 3 provided on the gate insulating film 2; and mutually separated first and second source/drain regions 4 that are provided, so that the first and second channel regions CH are held and are subjected to Schottky junction with the first-conductivity-type semiconductor region 1. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006100600(A) 申请公布日期 2006.04.13
申请号 JP20040285462 申请日期 2004.09.29
申请人 TOSHIBA CORP 发明人 YAGISHITA JUNJI
分类号 H01L29/786;H01L21/28;H01L21/336;H01L29/417;H01L29/47;H01L29/872 主分类号 H01L29/786
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