发明名称 METHOD OF FORMING A SEAL BETWEEN A HOUSING AND A DIAPHRAGM OF A CAPACITANCE SENSOR
摘要 The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the capacitance pressure transducer. The present invention utilizes spacer elements and sealing beads to form a seal that is disposed between the housing and the diaphragm of a capacitance pressure transducer. The sealing beads have a melting temperature that is lower than the melting temperature of the spacer elements. The sealing beads are melted so that they flow around and surround the unmelted spacer elements. Upon solidifying, the sealing beads and the spacer elements thus form the seal. The thickness of the seal can be established accurately and uniformly by controlling the height of the spacer elements. By utilizing a seal that has an accurate and uniform thickness, the opposing conductors of the capacitance pressure transducer can be accurately positioned and oriented in relationship to each other during the manufacturing process.
申请公布号 US2006079016(A1) 申请公布日期 2006.04.13
申请号 US20040960158 申请日期 2004.10.07
申请人 MKS INSTRUMENTS, INC. 发明人 GRUDZIEN CHRIS P.
分类号 H01L21/00 主分类号 H01L21/00
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