发明名称 |
Methods of controlling hydrogen fluoride pressure during chemical fabrication processes |
摘要 |
The present invention is a method for producing a crystalline end-product. The method comprising exposing a fluoride-containing precursor to a hydrogen fluoride absorber under conditions suitable for the conversion of the precursor into the crystalline end-product.
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申请公布号 |
US2006079404(A1) |
申请公布日期 |
2006.04.13 |
申请号 |
US20050245138 |
申请日期 |
2005.10.06 |
申请人 |
SOLOVYOV VYACHESLAV;WIESMANN HAROLD |
发明人 |
SOLOVYOV VYACHESLAV;WIESMANN HAROLD |
分类号 |
H01L39/24 |
主分类号 |
H01L39/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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