发明名称 Methods of controlling hydrogen fluoride pressure during chemical fabrication processes
摘要 The present invention is a method for producing a crystalline end-product. The method comprising exposing a fluoride-containing precursor to a hydrogen fluoride absorber under conditions suitable for the conversion of the precursor into the crystalline end-product.
申请公布号 US2006079404(A1) 申请公布日期 2006.04.13
申请号 US20050245138 申请日期 2005.10.06
申请人 SOLOVYOV VYACHESLAV;WIESMANN HAROLD 发明人 SOLOVYOV VYACHESLAV;WIESMANN HAROLD
分类号 H01L39/24 主分类号 H01L39/24
代理机构 代理人
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