| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and a method for providing a regenerating protective coating in a MEMS device. SOLUTION: In various embodiments of this invention, a regenerating protective coating is formed on at least one surface of an interior cavity of the MEMS device 80, Particular embodiments provide a regenerating protective coating 170 on one or more mirror surfaces of an interferometric light modulation device, also known as an iMoD in some embodiments. The protective coating can be regenerated through the addition of heat or energy to the protective coating. COPYRIGHT: (C)2006,JPO&NCIPI
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