EPITAXIAL REACTOR COOLING METHOD AND REACTOR COOLED THEREBY

摘要

The invention relates to a method for cooling the walls of the reaction chamber (2) of a reactor for chemical vapour deposition. The method consists in selectively cooling with water at least one predetermined zone of the wall of the chamber (2), to remove a different heat flow compared with the adjacent zones so as to obtain substantially uniform temperature distribution of the reaction chamber (2). In a preferred embodiment, the selectively-cooled zone is the zone above the susceptor (5) and is delimited by two ribs (8, 9). The invention also includes a reactor and a reaction chamber (2) for carrying out the cooling method.