GAS LASER OSCILLATOR

摘要

A gas laser oscillator in which piping clogging of an auxiliary discharge mechanism can be appropriately detected. The gas laser oscillator has a laser gas flow path, a drive section, a partition wall section, a main discharge mechanism, the auxiliary discharge mechanism, a detection section, and a piping clogging determination section. The laser gas flow path forms a circulation route for a laser gas. The drive section drives a blower for blowing the laser gas. The partition wall section separates off the blower and the drive section from each other. The main discharge mechanism has a valve and discharges the laser gas from the laser gas flow path. The auxiliary discharge mechanism discharges the laser gas from the drive section. The detection section detects the quantity of discharge of the laser gas discharged from the main discharge mechanism and the auxiliary discharge mechanism. The piping clogging determination section determines that piping clogging has occurred in the auxiliary discharge mechanism when a laser gas discharge quantity when the valve of the main discharge mechanism is closed is less than a predetermined value.