GRINDING METHOD FOR LAMINATE

摘要

PROBLEM TO BE SOLVED: To provide a grinding method for a laminate which can prevent a substrate from being damaged by fragments of a plate-like object occurring at the time of grind-cutting the plate-like object of a laminate which is made by joining the plate-like object to the substrate with an extremely narrow gap part left in-between. SOLUTION: When grind-cutting the plate-like object by cutting with a grinding stone into the gap part of the laminate made by joining the substrate and the plate-like object with the gap part left in-between, a protection layer for the substrate is formed in advance in the gap part to prevent the substrate from being damaged by the fragments of the plate-like object occurring during the grinding operation. COPYRIGHT: (C)2006,JPO&NCIPI