| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of fabricating interferometric modulators by selectively removing material. SOLUTION: The method for making MEMS devices such as interferometric modulators involves selectively removing a sacrificial portion of a material to form an internal cavity, leaving behind a remaining portion of the material to form a post structure. The material may be blanket deposited and selectively changed to define sacrificial portions that are selectively removable relative to the remaining portions. Alternatively, a material layer can be laterally recessed away from openings in a covering layer. These methods may be used to make unreleased and released interferometric modulators. COPYRIGHT: (C)2006,JPO&NCIPI
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