发明名称 |
Method and system for packaging MEMS devices with incorporated getter |
摘要 |
Methods and systems for packaging MEMS devices such as interferometric modulator arrays are disclosed. One embodiment of a MEMS device package structure includes a seal with a chemically reactant getter. Another embodiment of a MEMS device package comprises a primary seal with a getter, and a secondary seal proximate an outer periphery of the primary seal. Yet another embodiment of a MEMS device package comprises a getter positioned inside the MEMS device package and proximate an inner periphery of the package seal.
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申请公布号 |
US2006076634(A1) |
申请公布日期 |
2006.04.13 |
申请号 |
US20050102554 |
申请日期 |
2005.04.08 |
申请人 |
PALMATEER LAUREN;CUMMINGS WILLIAM J;GALLY BRIAN;CHUI CLARENCE;KOTHARI MANISH |
发明人 |
PALMATEER LAUREN;CUMMINGS WILLIAM J.;GALLY BRIAN;CHUI CLARENCE;KOTHARI MANISH |
分类号 |
H01L21/00;H01L29/84 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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