SCANNING PROJECTION ALIGNER, AND METHOD OF MANUFACTURING MICRO DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a scanning projection aligner in which the deviation in projecting position is accurately corrected.

SOLUTION: The scanning projection aligner transfers a mask pattern onto a photosensitive substrate to be exposed by making a synchronous movement of a mask stage and a substrate stage relative to a projection optical system PL containing first projection optical units and second projection optical units which are arranged zigzag. The scanning projection aligner includes: a reference mark for measuring the arrangements of the first and second projection optical units arranged on the substrate stage PST; and an arrangement adjusting means which adjusts the arrangement of the second projection optical units with the information on the arrangement of the first projection optical units as a target value, based on the information on the arrangement of the first projection optical units which is based on the measurement results of the relative positions of a reference mark using the first projection optical units and first mask marks arranged in a direction perpendicular to the scanning direction on the mask, and the measurement results of the relative positions of a reference mark using the second projection optical units and the first mask marks.

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