PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT STRUCTURE, METHOD OF MANUFACTURING PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT STRUCTURE, AND METHOD OF MANUFACTURING LIQUID JET HEAD

摘要

PROBLEM TO BE SOLVED: To provide an element which allows microfabrication generally used in a semiconductor process and area enlargement and is excellent in durability and ferroelectric properties, and a manufacturing method thereof; a piezoelectric element structure which is excellent in durability and piezoelectric property that is one of the ferroelectric properties; and a liquid jet head which has a long, high-density liquid jet nozzle and is stable and highly reliable, and a manufacturing method thereof.

SOLUTION: A piezoelectric/electrostrictive element structure comprises a buffer layer which is formed by being oriented-grown on a monocrystal substrate; a lower electrode layer which is formed by being oriented-grown on the buffer layer; a piezoelectric/electrostrictive layer which is formed by being oriented-grown on the lower electrode layer; and an upper electrode layer which is formed on the piezoelectric/electrostrictive layer. The buffer layer is patterned, and the piezoelectric/electrostrictive layer is patterned according to the pattern of the buffer layer.

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