| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection unit making inspection with a high reliability using a contact probe of coaxial structure simple for manufacture at a reasonable cost, even in the case of inspecting a device for RF with a short interval of electrode terminals. <P>SOLUTION: In the through hole 21 of the metal block 2, contact probes 1SIG for a RF signal are provided via the air gap to be a central conductor of the coaxial structure, and contact probes 1POW and 1GND for an electric source and for a gland are provided. On one side of the metal block 2, the fixing means 3 is provided for preventing each contact probe 1SIG, 1POW and 1GND from getting out of the metal block 2. A holding means 7 is provided for easily inserting the contact probe 1SIG for the RF signal, at the time of putting each one end of the contact probes 1SIG, 1POW and 1GND in the fixing means 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
