| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe pin for a probe card, free from the existence of pin holes or defects on a plated surface, with a pointed end part prevented from oxidating, an electrode material prevented from sticking thereto, contact resistance stabilized, and slipperiness owing to contained polytetrafluoro-ethylene sufficiently improved, as to a probe pin for a probe card equipped with a taper part on one end part thereof, the taper part having the pointed end part (pinpoint portion) formed like a needlepoint. SOLUTION: As to this probe pin 10 for a probe card equipped with the taper part 2 on one end part thereof, the taper part 2 having the pointed end part (pinpoint portion) 3 formed like a needlepoint, at least an end surface 3a of the pointed end part 3 is given polytetrafluoro-ethylene-containing plating of 3 to 10μm thickness. COPYRIGHT: (C)2006,JPO&NCIPI
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