| 摘要 |
PROBLEM TO BE SOLVED: To provide a compound microscope capable of analyzing shape information acquired by an optical microscope or physical property information acquired by a scanning type probe microscope irrespective of a measurement mode, and to provide a measuring method of the compound microscope. SOLUTION: An SPM image of a sample 3 measured by a PM unit 9 is analyzed and its analysis result is displayed on a display part 25 by a CPU 21 during measurement of a scanning type laser microscope unit 10, moreover, two-dimensional shape information or three-dimensional shape information of the sample 3 measured by the scanning type laser microscope unit 10 is analyzed and its analysis result is displayed on the display part 25 by the CPU 21 during the measurement of the SPM unit 9. COPYRIGHT: (C)2006,JPO&NCIPI |
