LINEAR MOTOR, STAGE APPARATUS AND EXPOSURE APPARATUS

摘要

A linear motor which has a high heat recovery efficiency and suppresses surface temperature increase is provided. A coil unit (141) is arranged to face a flow path (142a) of a liquid used for temperature adjustment in an envelop member (142), with at least one part having contact with the liquid. The coil unit (141) is provided with a coil body (144), a mold layer (143) for covering and holding the coil body (144) in a prescribed shape, and a liquid resistant layer (150) which has liquid resistance to the liquid and covers the mold layer (143).