发明名称 METHOD OF MANUFACTURING PIEZOELECTRIC CERAMIC, METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a technology for obtaining a piezoelectric ceramic composition capable of being fired at a low temperature. <P>SOLUTION: As the powder to be fired, one having 1.8-11.0 cm<SP>2</SP>/g specific surface area is used. As a result, the sintering property is improved and a piezoelectric ceramic having high sintering density and desired piezoelectric characteristics is obtained even if fired at &le;1,050&deg;C, further &le;1,000&deg;C. The piezoelectric ceramic can consist essentially of a component expressed by (Pb<SB>a1</SB>A<SB>a2</SB>)[(Zn<SB>1/3</SB>Nb<SB>2/3</SB>)xTi<SB>y</SB>Zr<SB>z</SB>]O<SB>3</SB>(where, A expresses at least a metal element selected from Sr, Ba and Ca and the atomic ratio satisfies 0.96&le;a1+a2&le;1.03, 0&le;a2&le;0.10, x+y+z=1, 0.05&le;x&le;0.40, 0.1&le;y&le;0.5 and 0.2&le;z&le;0.6). <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006096626(A) 申请公布日期 2006.04.13
申请号 JP20040285933 申请日期 2004.09.30
申请人 TDK CORP 发明人 NANAO MASARU;TSUKADA GAKUO;SAKAMOTO HIDEYA
分类号 C04B35/49;C04B35/493;H01L41/083;H01L41/187;H01L41/22;H01L41/273;H01L41/39;H01L41/43 主分类号 C04B35/49
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