METHOD AND APPARATUS FOR AUTOMATICALLY SORTING DEFECT

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for automatically sorting defects, which supply a non-reviewed defect with a defect class having a definition identical to that of a reviewed defect when carrying out sorting the defects, in order to effectively utilize information of non-reviewed defects being the majority on a wafer.

SOLUTION: The non-reviewed defect is supplied with the defect class having the identical definition, by using a defect data set which relates to defects of an inspection apparatus at a defect detection event, and the defect class of the reviewed defect given by an ADC of a review system.

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