| 摘要 |
PROBLEM TO BE SOLVED: To provide an Ag reflective film whose reflectance does not deteriorate even by a severe anti-corrosion test, and to provide a method for producing the film. SOLUTION: A two-layer film is obtained by depositing a film having 3 to 50 nm thickness constituted of a material selected from metal oxides of ITO, ZnO, IZO and SnO<SB>2</SB>, oxides of Si, Al, Ti and Ta, and nitrides of Si, Al, Ti and Ta, on a pure Ag film or a AgAu-based, AgAuSn-based, AgPd-based or AgPdCu-based alloy film, as an ultrathin cap layer. COPYRIGHT: (C)2006,JPO&NCIPI
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