| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem wherein dispersion of a height position of a probe pin is very difficult to be secured, because a test area for measuring concurrently a large number of items is widened in a wafer test of a semiconductor device and because a probe unit gets thereby large to make the probe unit very difficult to be fixed in parallel. SOLUTION: A gel sheet or a gel interposer sheet containing a gel substance is interposed between the probe unit 11 and a polyimide substrate to fix the probe unit and the polyimide substrate 12. The gel substance is formed into a uniform thickness in a contact face between the probe unit and the polyimide substrate to secure precisely parallelism of the both and to bring further an effect to be fixed stably by adhesion due to surface tension and adhesive force of the gel substance. This probe card 100 of the present invention for measuring concurrently the large number of items capable of making constant a height of the probe pin 10 is provided by this constitution. COPYRIGHT: (C)2006,JPO&NCIPI
|
